● 直接驱动无刷无槽伺服电机
● 直接耦合的高精度旋转编码器
● 25毫米孔径
● 可选配用于真空环境的旋转接头
机械设计
Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and rotating friction.A thick-walled, precision-ground shaft further minimizes wobble.Cable management is a snap with integral motor power and feedback connectors.Because the WaferMax T is a self-contained unit, it can be integrated easily into multi-stage stacks.Either a service loop or an integrated Aerotech cable management system (CMS) can be provided for a highly reliable solution.
无刷直驱
To maximize positioning performance, the WaferMax T utilizes Aerotech's S-series brushless, slotless motor.This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds.Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple.This makes the WaferMax T ideal for applications requiring outstanding contoured motion, smooth scan velocity or precise incremental steps.The low inertia and zero backlash make the WaferMax T the ideal solution for applications requiring frequent directional changes.精确定位
Performance is assured with a 10,000 lines per revolution encoder that results in 0.065 arc sec resolution.A 2048 line option is also available.The motor and high-performance rotary encoder are directly coupled to a common shaft.灵活配置
Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
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