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日本HORIBA LabRAM Odyssey Semiconductor

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  • 公司名称上海亨东仪器有限公司
  • 品       牌
  • 型       号
  • 所  在  地上海市
  • 厂商性质其他
  • 更新时间2023/11/22 14:07:30
  • 访问次数125
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上海亨东仪器有限公司是一家专注于仪器仪表、环保设备、检测设备、电气设备、五金工具、机械设备及配件、化工原料的开发,代理,销售和服务工作。供应HACH哈希COD试剂,WTWBOD测定仪,哈纳HANNA离子剂,Lovibond BOD测定仪,Lovibond色度仪等产品。公司拥有强大的专业技术服务支持队伍,的销售工程师,完善的售后服务体系,让服务更专业、更经济！上海亨东仪器有限公司在仪器领域拥有多年的研发和市场推广经验,并与一些院校和科研单位有着长期良好的合作关系.上海亨东仪器有限公司主要提供如下产品:水质分析仪品牌及检测项目美国哈希HACH,德国WTW,意大利HANNA,德国LOVIBOND、德国赛多利斯、瑞士梅特勒。 PH计/酸度计、电导率测定仪、溶解氧测定仪、水质离子测定仪、浊度测定仪、水质硬度计、化学需氧量COD/生化需氧量BOD快速测定仪、余氯总氯比色仪、总氮总磷分析仪、非分散红外测油仪/油分仪、农药残毒速测仪、土壤养分速测仪、紫外可见分光光度计、水质采样器、负离子浓度测试仪、电子天平等。水质分析仪品牌及检测项目嘉兴红声,杭州爱华,嘉兴恒升,美国NK等。噪声、振动、气象、风速、电磁辐射及放射性监测分析；电子安规测试；工业生产检测；以及工业卫生和食品安全等各种用途的仪器仪表等。检测设备、电气设备品牌及检测项目日本日置、美国luyor、中国台湾固纬、德图TESTO、日本图技GRAPHTEC红外测温仪、涂层测厚仪、测振仪、转速表、测温仪、激光测距仪、测力计、兆欧表、万用表、钳形表、示波器、数字示波器、信号源、电源、频谱分析仪、功率分析仪、等测试仪器.
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PH计/酸度计、电导率测定仪、溶解氧测定仪、水质离子测定仪、浊度测定仪、水质硬度计、化学需氧量COD/生化需氧量BOD快速测定仪、余氯总氯比色仪、总氮总磷分析仪、非分散红外测油仪/油分仪、农药残毒速测仪、土壤养分速测仪、紫外可见分光光度计、水质采样器、负离子浓度测试仪、电子天平等
产品简介 在线询价
日本HORIBA LabRAM Odyssey Semiconductor半导体显微镜是在直径达300mm的晶片上进行光致发光和拉曼成像的理想工具。HORIBA的真共焦显微镜配备了自动化300mm样品台和物镜转台,以满足晶圆均匀性评估和缺陷检查的需求。
日本HORIBA LabRAM Odyssey Semiconductor产品信息



LabRAM Odyssey Semiconductor includes hardware and software designed for semiconductors analysis:

  • Wafer mapping with automated turret and sample stage
    The automated 300 mm × 300 mm XYsample stageacceptswafers up to 300 mm (12") diameterfor Raman and Photoluminescence mapping of both full wafers and small regions of interest (ROI).The travel speed of the stage together with its stability ensure fast and reliable measurements over ROIs spread over the wafer surface.
  • Uniformity measurement with wafer tilt correction
    The"Tilt at midway" autofocus functioncorrects for any wafer bow and tilt, producing accurate whole wafer uniformity data, even from thin layers.This function is rapid since it determines the optimum focus height at only at five points prior to mapping: in the center and four points at midway between the center and the corners.
  • From full wafer to high resolution defect mapping with DuoScan™
    DuoScan™ confocal imaging technology is a confocal imaging mode with both capabilities of variable size lasermacro-spot scanning(using ultra-fast rastering mirrors) and high precisionsub-micron step scanning.Macro-spot scanning is suitable for full wafer mapping while sub-micron step scanning is adapted to defect analysis.
  • PL and Raman metrology in one tool
    The availability of many excitation lasers together with the wide spectral range of the system,from deep UV to near IR, allows simultaneous measurement of photoluminescence and Raman signals in the same spectrum.PL and Ramanin one toolsignificantly speeds up wafer characterization.
  • Methods: Easy recipe building for highly efficient characterization
    Methods will allow you to fully automate your entire Raman/PLcharacterization routine(acquisition, data processing, display, and analysis) providing high throughput that is manageable by metrology technicians.
    The "methods" building process is simple and intuitive : the process or metrology engineer can optimize each operation and in one click insert it into the recipe/method.Individual operations can be conveniently reordered, added or removed.
    This customization module is also aided by "templates" which is a way to save and recall a set of hardware configurations and software options.
  • ParticleFinder PF3: Automated particle characterization
    PF3 rapidly locates and chemically characterizescontaminantson a full wafer.
    PF3 automatically locates and Raman maps contamination particles.Also PF3 automatically identifies and classifies all detected impurities according to their chemical characteristics (organic, silicon, etc.).
    Statistics of morphological properties (area, perimeter, diameter, circularity, brightness, volume estimation, etc.) are also reported.



Dimensions

W × H × D (mm): 1400 × 620 × 1410

Optical microscope

Open space microscope with white light reflection illumination, camera, 5×, 10×, 100× objectives as standard.Optional motorized objective turret.

Spectral range

Standard 200 nm - 2200 nm from sample to detector (achromatic, no change of optics required).

Imaging spectrometer
  • Focal length: 800 mm.
  • Spectral resolution FWHM at 532 nm excitation wavelength ≤ 0.6 cm-1with 1800 gr/mm and ≤ 0.3 cm-1with 3000 gr/mm.
  • Spectral stability RMS: < 0.02 cm-1RMS Measured on Si 520 cm-1line.
  • Equipped with Open Electrode CCD (standard), optional EMCCD, optional InGaAs arrays detector (max.3 detectors).

Spatial resolution

XY lateral resolution < 0.5 µm!Z axial resolution < 1.5 µm.

300 mm × 300 mm motorized stage

XY high precision encoded motorized stage (X = 300 mm, Y = 300mm) with repeatability ≤1 µm!accuracy = 1 µm!resolution (encoder) = 50 nm!minimum motor step size = 10 nm.
Z specifications: resolution (minimum step size) = 0.01 µm.
Holders for 4" (100 mm), 6" (150 mm), 8" (200 mm) and 12" (300 mm) size wafers available.Vacuum compatible wafer holders.

Lasers

User selectable: 266 nm, 325 nm, 355 nm, 405 nm, 458 nm, 473 nm, 532 nm, 633 nm, 660 nm, 785 nm, & 1064 nm.Up to 6 motorized.

DuoScan™

DuoScan™ technology for fast Laser scanning and Macrospot imaging (typical macrospot dimensions 30 µm × 30 µm with 50× objective).


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